CIV for MEMS Characterization
Recent dramatic growth in the consumer MEMS market has seen the cell phone develop into a powerful hand-held computer. These developments have been fueled by progress in development of increasingly sophisticated acceleration sensors, gyros, magnetic sensors, microphones, pressure sensors and RF filters which has grown into a multibillion dollar market. However characterization of the dynamic behavior of micro-scale MEMS devices remains a non-trivial task, requiring detailed analysis of their temporal and spatial response to environmental variables and coupled external vibrations. The unique features and capabilities of AS&T's Conformal Imaging Vibrometer (CIV) allows complete capture of the vibrational response of MEMS in one shot, making their characterization fast, reliable and precise.